Surface segregation and its implications for sputtering
作者： J. Kirschner
DOI: 10.1016/0168-583X(85)90462-8
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摘要: Abstract An overview on the present experimental and theoretical knowledge about surface segregation is given. Modern electronic theories are compared to phenomenological empirical models. Various driving forces for outlined, a brief account kinetics of ideal solutions The techniques study critically examined. altered layer its relation radiation enhanced diffusion discussed. It argued that profile should be viewed as stationary non-equilibrium with modifications due sputtering diffusion. impact processes appearance sputter profiles demonstrated.
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