Study of performance degradation in Titanium microbolometer IR detectors due to elevated heating

摘要: Heating of thermal detectors is a major reliability concern because they are always subjected to heat whenever in operation and while absorbing excessive may get degraded or damaged. In case microbolometer Infrared (IR) detectors, heating can occur due the absorbed radiations also bias current. metal film microbolometers, wherein high current supplied for improving responsivity, an issue. To study effects Titanium microbolometer, we fabricated linear array such microbolometers performed destructive experiment passing pulses through it report here that even though power pulse mode cannot damage element physically, be sufficient significant performance degradations. With this extracted maximum our sustain without degradation 2.25 mW. We have reported specific signature temperature coefficient resistance (TCR) that, up safe limit, remains almost constant when limit crossed, reduces rapidly much lower value. If keep increasing further increases slightly attains kind saturation.