A low-cost uncooled infrared aluminum microbolometer in a standard CMOS technology

摘要: This article introduces the implementation of a low-cost 4 × 5 pixel array uncooled infrared microbolometer together with its integrated readout circuit in standard 0.5-µm CMOS technology and post-CMOS process. Each pixel, which has size 80 µm µm, is novel structure aluminum fabricated by etching surface sacrificial layer without any additional masking lithography procedure. The consists an thermistor thermally isolated micromachined membrane suspended two arms. thermal conductance, time constant, capacitance, responsivity are experimentally measured.