Structure and properties of quasi-amorphous films prepared by ion beam techniques☆
作者： C. Weissmantel , K. Bewilogua , D. Dietrich , H.-J. Erler , H.-J. Hinneberg
DOI: 10.1016/0040-6090(80)90554-4
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摘要: Ion beam deposition techniques offer interesting possibilities for the preparation of metastable quasi-amorphous films owing to a high local activation and rapid quenching on an atomic …
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