Semiconductor testing device
作者： Kazuhiro Tashiro , Futoshi Fukaya , Makoto Haseyama , Shigeyuki Maruyama
DOI:
关键词:
摘要: A semiconductor testing device is used for a which has at least one spherical connection terminal. The includes an insulating substrate having opening formed therein position corresponding to the of terminal, and contact member, on substrate, including portion connected with being deformable extending into opening.
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