Structural and electrical properties of aluminum-doped zinc oxide films prepared by sol–gel process

作者: Radhouane Bel Hadj Tahar

DOI: 10.1016/J.JEURCERAMSOC.2004.08.028

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摘要: Abstract Aluminium-doped zinc oxide films were prepared through a non-alkoxide dip-coating technique from acetate and aluminium nitrate in alcoholic solution. The doping concentration the varied between 0 8 at.%. structural electrical properties of Al-doped (AZO) are investigated terms preparation conditions, such as Al content, precursor solution, firing annealing temperatures. crystal structure AZO is hexagonal wurtzite. In present study, we found that critical parameter determining quality aluminum concentration. crystallographic orientation depends on system used film regardless content heat-treatment temperature. resistivity 1 at.%-doped 2.5 × 10 −3  Ω cm mainly electronic mobility.

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