Superhard behaviour, low residual stress, and unique structure in diamond-like carbon films by simple bilayer approach
作者： Sushil Kumar , Hitendra K. Malik , Neeraj Dwivedi
DOI: 10.1063/1.4739287
关键词:
摘要: Simple bilayer approach is proposed for synthesizing hard and superhard diamond-like carbon (DLC) coatings with reduced residual stress. For this, M/DLC (M = Ti Cu) structures are grown using hybrid system involving radio frequency (RF)-sputtering RF-plasma enhanced chemical vapor deposition techniques. Ti/DLC deposited at negative self bias of 100 V shows behaviour hardness (H) as 49 GPa. Cu/DLC exhibits H 22.8 GPa. The (Cu/DLC) gets changed from (hard) to (moderate hard) regime, when the raised 300 V. Residual stress in found be significantly low that varies range 1 GPa–1.65 GPa (0.8 GPa–1.6 GPa). microstructure morphology studied by Raman spectroscopy, scanning electron microscopy (SEM), atomic force (AFM). SEM AFM pictures reveal creation nanostructured features de...
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