Fabrication and characterization of a nanoelectromechanical switch with 15-nm-thick suspension air gap
作者： Weon Wi Jang , Jeong Oen Lee , Jun-Bo Yoon , Min-Sang Kim , Ji-Myoung Lee
DOI: 10.1063/1.2892659
关键词:
摘要: We developed titanium nitride (TiN) based nanoelectromechanical (NEM) switch with the smallest suspension air-gap thickness ever made to date by a “top-down” complementary metal-oxide semiconductor fabrication methods. Cantilever-type NEM 15-nm-thick air gap and 35-nm-thick TiN beam was successfully fabricated characterized. The cantilever-type showed an essentially zero off current, abrupt switching less than 3mV/decade, on/off current ratio exceeding 105 in ambient. Also achieved endurance of over several hundreds cycles under dc ac biases
harvard.edu
scitation.org
aip.org
sci-hub.se 参考文章(14)
Gregory T. A. Kovacs, Micromachined Transducers Sourcebook ,(1998)
J. P. Hollingsworth, P. R. Bandaru, Carbon nanotube based nonvolatile memory Applied Physics Letters. ,vol. 87, pp. 233115- ,(2005) , 10.1063/1.2139847
Sang Wook Lee, Dong Su Lee, Raluca E. Morjan, Sung Ho Jhang, Martin Sveningsson, O. A. Nerushev, Yung Woo Park, Eleanor E. B. Campbell, A Three-Terminal Carbon Nanorelay Nano Letters. ,vol. 4, pp. 2027- 2030 ,(2004) , 10.1021/NL049053V
Thomas Rueckes, Kyoungha Kim, Ernesto Joselevich, Greg Y Tseng, Chin-Li Cheung, Charles M Lieber, Carbon nanotube-based nonvolatile random access memory for molecular computing Science. ,vol. 289, pp. 94- 97 ,(2000) , 10.1126/SCIENCE.289.5476.94
Ho Jung Hwang, Jeong Won Kang, Carbon-nanotube-based nanoelectromechanical switch Physica E-low-dimensional Systems & Nanostructures. ,vol. 27, pp. 163- 175 ,(2005) , 10.1016/J.PHYSE.2004.11.004
L M Jonsson, S Axelsson, T Nord, S Viefers, J M Kinaret, High frequency properties of a CNT-based nanorelay Nanotechnology. ,vol. 15, pp. 1497- 1502 ,(2004) , 10.1088/0957-4484/15/11/022
Changhong Ke, Horacio D. Espinosa, Feedback controlled nanocantilever device Applied Physics Letters. ,vol. 85, pp. 681- 683 ,(2004) , 10.1063/1.1767606
Anupama B. Kaul, Eric W. Wong, Larry Epp, Brian D. Hunt, Electromechanical carbon nanotube switches for high-frequency applications Nano Letters. ,vol. 6, pp. 942- 947 ,(2006) , 10.1021/NL052552R
Robert L. Badzey, Guiti Zolfagharkhani, Alexei Gaidarzhy, Pritiraj Mohanty, Controllable nanomechanical memory element Applied Physics Letters. ,vol. 85, pp. 3587- 3589 ,(2005) , 10.1063/1.1808507
Z Lee, C Ophus, L M Fischer, N Nelson-Fitzpatrick, K L Westra, S Evoy, V Radmilovic, U Dahmen, D Mitlin, Metallic NEMS components fabricated from nanocomposite Al–Mo films Nanotechnology. ,vol. 17, pp. 3063- 3070 ,(2006) , 10.1088/0957-4484/17/12/042