An Investigation of the Plasma Chemistry Involved in the Synthesis of ZnO by PECVD
作者： Joshua J. Robbins , James Esteban , Cassandra Fry , Colin A. Wolden
DOI: 10.1149/1.1605746
关键词:
摘要: … In this study intrinsic ZnO thin films were deposited on glass substrates by PECVD using … in hydrocarbon combustion. So much so that we have borrowed the combustion concept of …
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