Method for forming a nested surface capacitor
作者： Howard C. Kirsch
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摘要: A nested surface capacitor and method of formation. The has a substrate (14) an overlying dielectric layer (16). Conductive (18) overlies the Three conductive cylindrical structures respectively referred to as inner cylinder (30), central (22') outer (32) overlie (18). (30) lies within (22'). (32). Together, cylinders (30, 22', 32) form first electrode for capacitor. (38) acts dielectric. (40) forms second
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