Stabilization of porous silicon surface by thermal decomposition of acetylene
作者： J. Salonen , M. Björkqvist , E. Laine , L. Niinistö
DOI: 10.1016/J.APSUSC.2003.10.028
关键词:
摘要: … at lower temperature it is possible to obtain the hydrocarbon terminated PSi surface by using thermal decomposition of acetylene. There is a threshold temperature which changes the …
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