Effect of orientation on the dielectric and piezoelectric properties of 0.2Pb(Mg1/3Nb2/3)O3–0.8Pb(Zr0.5Ti0.5)O3 thin films

作者: Ki Hyun Yoon , Byoung Duk Lee , Jihoon Park

DOI: 10.1063/1.1394947

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摘要: 0.2Pb(Mg1/3Nb2/3)O3–0.8Pb(Zr0.5Ti0.5)O3 (0.2PMN–0.8PZT) thin films were deposited on Pt(111)/Ti/SiO2/Si [Pt(111)] and Pt(200)/SiO2/Si [Pt(200)] substrates by a sol–gel method, the effect of orientation piezoelectric dielectric properties 0.2PMN–0.8PZT was investigated. The Pt(111) Pt(200) showed strong (111) (100) preferred orientations, respectively. spontaneous polarization oriented film higher than that film. However, constant (K) transverse coefficients (d31) Because direction is more tilted away from normal to surface film, coefficient enhanced.

参考文章(15)
Katsuhiro Aoki, Yukio Fukuda, Ken Numata, Akitoshi Nishimura, Dielectric Properties of (111) and (100) Lead-Zirconate-Titanate Films Prepared by Sol-Gel Technique Japanese Journal of Applied Physics. ,vol. 33, pp. 5155- 5158 ,(1994) , 10.1143/JJAP.33.5155
Xiao-hong Du, Jiehui Zheng, Uma Belegundu, Kenji Uchino, Crystal orientation dependence of piezoelectric properties of lead zirconate titanate near the morphotropic phase boundary Applied Physics Letters. ,vol. 72, pp. 2421- 2423 ,(1998) , 10.1063/1.121373
Jeong Hwan Park, Dong Heon Kang, Ki Hyun Yoon, Effects of Heating Profiles on the Orientation and Dielectric Properties of 0.5Pb(Mg1/3Nb2/3)O3-0.5PbTiO3 Thin Films by Chemical Solution Deposition Journal of the American Ceramic Society. ,vol. 82, pp. 2116- 2120 ,(2004) , 10.1111/J.1151-2916.1999.TB02050.X
Xiao-hong Du, Uma Belegundu, Kenji Uchino, Crystal Orientation Dependence of Piezoelectric Properties in Lead Zirconate Titanate : Theoretical Expectation for Thin Films Japanese Journal of Applied Physics. ,vol. 36, pp. 5580- 5587 ,(1997) , 10.1143/JJAP.36.5580
G. A. C. M. Spierings, G. J. M. Dormans, W. G. J. Moors, M. J. E. Ulenaers, P. K. Larsen, STRESSES IN PT/PB(ZR,TI)O3/PT THIN-FILM STACKS FOR INTEGRATED FERROELECTRIC CAPACITORS Journal of Applied Physics. ,vol. 78, pp. 1926- 1933 ,(1995) , 10.1063/1.360230
Toru Fujii, Shunji Watanabe, Masatoshi Suzuki, Takamitsu Fujiu, None, Application of lead zirconate titanate thin film displacement sensors for the atomic force microscope Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 13, pp. 1119- 1122 ,(1995) , 10.1116/1.587914
J.S. Zhu, X.M. Lu, P. Li, W. Jiang, Y.N. Wang, Stress effects in ferroelectric thin films Solid State Communications. ,vol. 101, pp. 263- 266 ,(1997) , 10.1016/S0038-1098(96)00545-5
Joseph F. Shepard, Fan Chu, Isaku Kanno, Susan Trolier-McKinstry, Characterization and aging response of the d31 piezoelectric coefficient of lead zirconate titanate thin films Journal of Applied Physics. ,vol. 85, pp. 6711- 6716 ,(1999) , 10.1063/1.370183
V. Nagarajan, S. P. Alpay, C. S. Ganpule, B. K. Nagaraj, S. Aggarwal, E. D. Williams, A. L. Roytburd, R. Ramesh, Role of substrate on the dielectric and piezoelectric behavior of epitaxial lead magnesium niobate-lead titanate relaxor thin films Applied Physics Letters. ,vol. 77, pp. 438- 440 ,(2000) , 10.1063/1.127002