作者: Lu Daozheng , Zhang Yaowen , Yang Yizhen , Wu Guanwei
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摘要: The invention discloses a storage unit and manufacture method. member comprises substrate, plurality of lamination structures, conducting columns, charge layers third conductor layers; the layer structures are arranged on base; along first direction extended second direction, wherein each structure dielectric which alternatively laminated direction; column is base between two adjacent structures; positioned column; intersected with in multiple intersection areas covers part tops columns; area has an air gap direction.