Monitoring the chemical vapor deposition growth of multiwalled carbon nanotubes by tapered element oscillating microbalance

摘要: The growth of multiwalled carbon nanotubes (MWCNTs) produced by a catalytic chemical vapor deposition (CCVD) process has been monitored using tapered element oscillating microbalance (TEOM) probe. This technique displays high sensitivity (<1μg). Growths in the TEOM microreactor are investigated with particles (Fe, Ni) dispersed on different supports. First, surface area Fe∕Al2O3 or Fe (Ni) exchanged zeolite powders is used. Second, growths performed array nickel dots Fe∕Si-nc large holes patterned Si(100) substrates. An accurate monitoring early stages permits precise evaluation rates and shows substantial differences between these samples which greatly differ area. On catalysts mass uptake linear throughout process. catalysts, however, saturation indifferently observed. explained either diffusion lim...