Influence of composition, bonding characteristics and microstructure on the electrochemical and optical stability of AlOxNy thin films

作者: J. Borges , C. Fonseca , N.P. Barradas , E. Alves , T. Girardeau

DOI: 10.1016/J.ELECTACTA.2013.05.020

关键词:

摘要: Abstract Thin films of AlOxNy were deposited by magnetron sputtering in a wide composition range. Different structures and morphologies observed, depending on the bonding states, which opened possibility to tailor properties this oxynitride system between those pure Al nitride oxide films. In range stoichiometries, one can report formation nanocomposite porous films, where nanoparticles are dispersed an amorphous matrix AlOxNy. The electrochemical behaviour was studied isotonic NaCl solution. It observed that pitting potential characteristic aluminium disappears with incorporation oxygen nitrogen being replaced smooth current increase. Electrochemical impedance spectroscopy performed during 35 days showed corrosion resistance steadily increases. unusual optical reflectance profile some is maintained after immersion for several months.

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