Epitaxial/amorphous Ba0.3Sr0.7TiO3 film composite structure for tunable applications
作者： Tomoaki Yamada , Vladimir O. Sherman , Andreas Nöth , Paul Muralt , Alexander K. Tagantsev
DOI: 10.1063/1.2226999
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摘要: A Ba0.3Sr0.7TiO3 (BST) thin film composite structure was fabricated by means of a selective epitaxial growth process. The BST on SrRuO3 electrode surface selectively achieved at 485°C using prepatterned ultrathin amorphous layer that locally prevented crystallization. This self-buildup mechanism resulted in columnar structure, where and columns are electrically connected parallel. effective permittivity the capacitors decreased linearly upon increasing concentration, while tunability stayed fairly unchanged until it reached 70%. results agree with theoretical ferroelectric∕dielectric parallel model.
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