Experiments and TRIM simulations on sputtering of well defined amorphous metal alloys containing impurities
作者： N. Inoue , A. Sagara , Y. Nishi
DOI: 10.1016/0022-3115(94)00606-7
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摘要: Abstract Sputtering yields of amorphous metal alloys FeCoSiB are measured and compared with numerical simulations based on the TRIM.SP code. The samples prepared under well controlled cooling condition during quenching, resulting in defined values density bonding energy. Ar ion beam sputtering is carried out by using a Kaufman-type source an energy current 1.0 keV 0.6 mA/cm 2 . From eroded depth, yield determined as function atomic energy, showing remarkable dependence both these quantities. change explained simulation.
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