Formation of discontinuous films during an imprint lithography process
作者： Mario J. Meissl , Byung Jin Choi , Michael P. C. Watts , Sidlagata V. Sreenivasan
DOI:
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摘要: The present invention is directed to a template having body including surface with first and second regions. region has wetting characteristics for given material the material. differ from characteristics. Specifically, formed treatment layer energy provide exposed portions of body, typically quartz fused silica, associated therewith. greater than
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