Imprint method and processing method of substrate using the imprint method
作者： Junichi Seki , Atsunori Terasaki , Shingo Okushima , Nao Nakatsuji , Haruhito Ono
DOI:
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摘要: An imprint method for imprinting a pattern of mold onto resin material on substrate includes step forming first processed area in which an corresponding to the is formed and outside at periphery by bringing into contact with substrate; protection layer, protecting area, area; removing layer while protected so as not be removed.
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