Compact low-loss monolithic CPW filters using air-gap overlay structures

作者: Hong-Teuk Kim , Jae-Hyoung Park , Yong-Kweon Kim , Youngwoo Kwon

DOI: 10.1109/7260.941779

关键词:

摘要: In this letter, two types of compact low-loss monolithic coplanar waveguide (CPW) filters using air-gap overlay structures are presented. Vertical stacking in offers size reduction. Furthermore, do not require additional dielectric process and free from losses. An X-band bandpass filter overlaid artificial transmission lines showed 67% A stepped-impedance low-pass highly separated metal-air-metal (MAM) capacitors as low-impedance achieved only but also loss Small size, low loss, simple steps make the very promising for CPW passive devices such filters.

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