Influence of flow ratio on mechanical and tribological properties of hydrogenated carbon nitride films prepared by DC-RF-PECVD
作者： Junying Hao , Tao Xu , Junyan Zhang , Weimin Liu
DOI: 10.1088/0022-3727/39/6/021
关键词:
摘要: Amorphous hydrogenated carbon nitride (a-CN : H) films were deposited onto silicon (n-100) substrates by dual direct current radio frequency plasma enhanced chemical vapour deposition with CH 4 and N 2 as feedstock at different ratios. The composition surface morphology of the characterized means x-ray photoelectron spectroscopy, Raman spectroscopy atomic force microscopy; while mechanical tribological properties evaluated using nano-indentation UMT test system. It was found that rate decreased significantly but N/C ratio, roughness I D /I G ratio increased /CH flow increased. nano-hardness adhesion strength to substrate sharply first then increasing ratio. Moreover, wear resistance varied structure transformation from an sp 3 -like carbon-nitrogen network in also revealed.
harvard.edu
irgrid.ac.cn参考文章(40)
Yves Catherine, Preparation Techniques for Diamond-Like Carbon Diamond and Diamond-like Films and Coatings. pp. 193- 227 ,(1991) , 10.1007/978-1-4684-5967-8_10
Amy Y. Liu, Marvin L. Cohen, Structural properties and electronic structure of low-compressibility materials: β-Si3N4and hypothetical β-C3N4 Physical Review B. ,vol. 41, pp. 10727- 10734 ,(1990) , 10.1103/PHYSREVB.41.10727
J. Schwan, S. Ulrich, V. Batori, H. Ehrhardt, S. R. P. Silva, Raman spectroscopy on amorphous carbon films Journal of Applied Physics. ,vol. 80, pp. 440- 447 ,(1996) , 10.1063/1.362745
S. Meskinis, M. Andrulevicius, V. Kopustinskas, S. Tamulevicius, XPS study of the ultrathin a-C:H films deposited onto ion beam nitrided AISI 316 steel Applied Surface Science. ,vol. 249, pp. 295- 302 ,(2005) , 10.1016/J.APSUSC.2004.12.007
Md.Nizam Uddin, Osama A. Fouad, Masaaki Yamazato, Masamitsu Nagano, Deposition and characterization of carbon nitride films from hexamethylenetetramine/N2 by microwave plasma-enhanced chemical vapor deposition Applied Surface Science. ,vol. 240, pp. 120- 130 ,(2005) , 10.1016/J.APSUSC.2004.06.020
Hongxuan Li, Tao Xu, Jianmin Chen, Huidi Zhou, Huiwen Liu, Preparation and characterization of hydrogenated diamond-like carbon films in a dual DC-RF plasma system Journal of Physics D. ,vol. 36, pp. 3183- 3190 ,(2003) , 10.1088/0022-3727/36/24/014
N. Mubumbila, P.-Y. Tessier, B. Angleraud, G. Turban, Effect of nitrogen incorporation in CNx thin films deposited by RF magnetron sputtering Surface & Coatings Technology. ,vol. 151, pp. 175- 179 ,(2002) , 10.1016/S0257-8972(01)01569-9
N.Alba de Sánchez, C. Carrasco, P. Prieto, Effect of nitrogen content on the microstructure and mechanical properties of CNx thin films Physica B-condensed Matter. ,vol. 337, pp. 318- 322 ,(2003) , 10.1016/S0921-4526(03)00423-X
A Fernández, C Fernández-Ramos, J.C Sánchez-López, Preparation, microstructural characterisation and tribological behaviour of CNx coatings Surface & Coatings Technology. ,vol. 163, pp. 527- 534 ,(2003) , 10.1016/S0257-8972(02)00615-1
Hong Deng, Thomas W. Scharf, John A. Barnard, Adhesion assessment of silicon carbide, carbon, and carbon nitride ultrathin overcoats by nanoscratch techniques Journal of Applied Physics. ,vol. 81, pp. 5396- 5398 ,(1997) , 10.1063/1.364551