In situ method of densification for powder-based piezoelectric thick films for microelectromechanical system applications
作者： Jae Hong Park , Hyoung-Ho Park
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摘要: Piezoelectric (PZT) (Pb(Zr 0.52 Ti 0.48 )O 3 ) thick film-based microtransducers demonstrate excellent piezoelectric performances. PZT films on Si-based substrate can be used as actuators and sensors with the introduction of microelectromechanical system technology screen printing method. However, made just by method have high porosity compared bulk product, problems regarding degradation active materials interface properties owing to inter-diffusion or reaction between Si at temperature for sintering. Thus, authors fabricated printed using sol infiltration enhancing densification. Ethanol-based photo-cross-linkable conventional diol-based were compare influence patterning process. Thick relative densities low temperature, 800°C without layers film accomplished. Also, it was revealed that treated ethanol-based showed better electrical well patternability.
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