MEMS device with protection rings
作者： Meng-Jia Lin , Tzung-Han Tan , Ming-I Wang , Bang-Chiang Lan , Chien-Hsin Huang
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摘要: A microelectromechanical system (MEMS) device and a method for fabricating the same are described. The MEMS includes first electrode second electrode. is disposed on substrate, at least two metal layers, protection ring dielectric layer. connects adjacent so as to define an enclosed space between layers. layer in electrode, wherein cavity formed
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