搜索历史记录选项已关闭,请开启搜索历史记录选项。
作者: Yunosuke Makita , Shun-ichi Gonda , Hisao Tanoue , Toshio Tsurushima , Shigeru Maekawa
DOI: 10.1143/JJAP.13.563
关键词:
摘要:
Ion Implantation in Semiconductors,1975, 引用: 0
Applied Physics Letters,1976, 引用: 27
Japanese Journal of Applied Physics,1974, 引用: 13
Applied Physics Letters,1976, 引用: 13
Japanese Journal of Applied Physics,1975, 引用: 2
Journal of Applied Physics,1980, 引用: 5
Applied physics,1980, 引用: 1
Applied Physics Letters,1979, 引用: 13
Materials Science and Engineering: R: Reports,1996, 引用: 8
Applied physics,1981, 引用: 2