Refractive index and hygroscopic stability of AlxGa1−xAs native oxides
作者： D. C. Hall , H. Wu , L. Kou , Y. Luo , R. J. Epstein
DOI: 10.1063/1.124612
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摘要: The authors present prism coupling measurements on Al{sub x}Ga{sub 1{minus}x}As native oxides showing the dependence of refractive index composition (0.3 {le} x 0.97), oxidation temperature (400 T 500), and carrier gas purity. Index values range from n = 1.490 (x 0.9, 400) to 1.707 0.3, 500 C). are shown adsorb moisture, increasing their by up 0.10 (7%). Native 0.5) have 0.27 higher less hygroscopic when prepared with a small amount O{sub 2} in N{sub + H{sub 2}O process gas. attributed greater degree Ga film.
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