Sealed-type liquid cooling device with expandable bellow for semiconductor chips

作者: Ryoichi Kajiwara , Takeshi Matsuzaka , Takao Funamoto , Hiroshi Wachi , Tomohiko Shida

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摘要: A semiconductor module cooling structure comprises a housing having passage through which fluid flows; block to the is supplied from and has an electrical insulating layer at bottom portion combined with chip layer; bellows connected between block. The bellows. formed in manner such that plurality of substantially plane ring-like metal plates are laminated, pressed, diffused, joined, thereafter stretched molded.

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