UHV magnetron sputtering of silver films on rocksalt: quantitative X-ray texture analysis of substrate-temperature-dependent microstructure

摘要: Abstract Using X-ray diffraction methods, including pole figure determination, the microstructures of silver buffer layers deposited by magnetron sputtering on to (001) rocksalt are investigated as a function substrate temperature. A quantitative analysis is reported grain orientations, and transition from (111) orientation polycrystalline films single-crystal with increasing temperature confirmed. In addition, relative proportion two distinct relationships measured for first time. It shown that pole-figure technique can be used studies microtwinning in grains; both volume fraction (at most 1.5%), twin thickness (∼6 nm, streaking) determined.