Tris(phosphino)borato silver(I) complexes as precursors for metallic silver aerosol-assisted chemical vapor deposition.
作者： Matthew N. McCain , Sven Schneider , Michael R. Salata , Tobin J. Marks
DOI: 10.1021/IC701852X
关键词: Crystallite 、 Inorganic chemistry 、 Island growth 、 Thermogravimetric analysis 、 Metal 、 Scanning electron microscope 、 Chemistry 、 X-ray photoelectron spectroscopy 、 Thin film 、 Chemical vapor deposition
摘要: A series of light- and air-stable tris(phosphino)borato silver(I) complexes has been synthesized, structurally spectroscopically characterized, implemented in the growth low resistivity metallic silver thin films by aerosol-assisted chemical vapor deposition (AACVD). Of four series, [RB(CH2PR'2) 3]AgPEt3 (R = Ph (1, 3), (n)Bu (2, 4); R' 2), (i)Pr (3, 4), 1 2 have characterized single-crystal X-ray diffraction. Complex represents a significant improvement over previously available nonfluorinated Ag precursors, owing to ease handling efficient film characteristics. Thermogravimetric analysis (TGA) shows that thermolytic properties these can be significantly modified altering ligand structure. Polycrystalline cubic-phase were grown on glass, MgO(100), 52100 steel substrates. thicknesses 3 microm, at rates 14-18 nm/min, exhibit levels extraneous element contamination photoelectron spectroscopy (XPS). Atomic force microscopy (AFM) scanning electron (SEM) indicate proceeds primarily via an island (Volmer-Weber) mechanism.
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