Doping suppression and mobility enhancement of graphene transistors fabricated using an adhesion promoting dry transfer process

作者: Woo Cheol Shin , Taeshik Yoon , Jeong Hun Mun , Taek Yong Kim , Sung-Yool Choi

DOI: 10.1063/1.4846317

关键词:

摘要: We present the facile dry transfer of graphene synthesized via chemical vapor deposition on copper film to a functional device substrate. High quality uniform oxidized silicon substrate was achieved by exploiting beneficial features poly(4-vinylphenol) adhesive layer involving strong adhesion energy and negligible influence electronic structural properties graphene. The field effect transistors (FETs) fabricated using process exhibit excellent electrical performance in terms high FET mobility low intrinsic doping level, which proves feasibility our approach graphene-based nanoelectronics.

参考文章(31)
Xuelei Liang, Brent A. Sperling, Irene Calizo, Guangjun Cheng, Christina Ann Hacker, Qin Zhang, Yaw Obeng, Kai Yan, Hailin Peng, Qiliang Li, Xiaoxiao Zhu, Hui Yuan, Angela R. Hight Walker, Zhongfan Liu, Lian-mao Peng, Curt A. Richter, Toward Clean and Crackless Transfer of Graphene ACS Nano. ,vol. 5, pp. 9144- 9153 ,(2011) , 10.1021/NN203377T
Christopher A. Hunter, Jeremy K. M. Sanders, The nature of .pi.-.pi. interactions Journal of the American Chemical Society. ,vol. 112, pp. 5525- 5534 ,(1990) , 10.1021/JA00170A016
José M. Galicia Hernández, Ernesto Chigo Anota, María T. Romero de la Cruz, Minerva González Melchor, Gregorio Hernández Cocoletzi, First principles studies of the graphene-phenol interactions Journal of Molecular Modeling. ,vol. 18, pp. 3857- 3866 ,(2012) , 10.1007/S00894-012-1382-7
Svetla D. Chakarova-Käck, Øyvind Borck, Elsebeth Schröder, Bengt I. Lundqvist, Adsorption of phenol on graphite(0001) and α-Al2O3(0001): Nature of van der Waals bonds from first-principles calculations Physical Review B. ,vol. 74, pp. 155402- ,(2006) , 10.1103/PHYSREVB.74.155402
Zengguang Cheng, Qiaoyu Zhou, Chenxuan Wang, Qiang Li, Chen Wang, Ying Fang, Toward intrinsic graphene surfaces: a systematic study on thermal annealing and wet-chemical treatment of SiO2-supported graphene devices. Nano Letters. ,vol. 11, pp. 767- 771 ,(2011) , 10.1021/NL103977D
Woo Cheol Shin, Taek Yong Kim, Onejae Sul, Byung Jin Cho, None, Seeding atomic layer deposition of high-k dielectric on graphene with ultrathin poly(4-vinylphenol) layer for enhanced device performance and reliability Applied Physics Letters. ,vol. 101, pp. 033507- ,(2012) , 10.1063/1.4737645
Florian Banhart, Jani Kotakoski, Arkady V. Krasheninnikov, Structural defects in graphene ACS Nano. ,vol. 5, pp. 26- 41 ,(2011) , 10.1021/NN102598M
E. H. Hwang, S. Adam, S. Das Sarma, Carrier transport in two-dimensional graphene layers. Physical Review Letters. ,vol. 98, pp. 186806- 186806 ,(2007) , 10.1103/PHYSREVLETT.98.186806
Jong Kyung Park, Seung Min Song, Jeong Hun Mun, Byung Jin Cho, Graphene gate electrode for MOS structure-based electronic devices. Nano Letters. ,vol. 11, pp. 5383- 5386 ,(2011) , 10.1021/NL202983X
Joong Gun Oh, Yunsang Shin, Woo Cheol Shin, Onejae Sul, Byung Jin Cho, None, Dirac voltage tunability by Hf1−xLaxO gate dielectric composition modulation for graphene field effect devices Applied Physics Letters. ,vol. 99, pp. 193503- ,(2011) , 10.1063/1.3659691