Liquid Core ARROW Waveguides by Atomic Layer Deposition
作者： Genni Testa , Yujian Huang , Luigi Zeni , Pasqualina M. Sarro , Romeo Bernini
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摘要: We report on the use of atomic layer deposition (ALD) process for fabricating liquid core antiresonant reflecting optical waveguides (ARROWs). The ALD permits a very conformal sub-100-nm titanium dioxide layer. This results in low loss ARROW waveguide with broadband output transmission spectrum. Optical transmitted spectrum from fabricated structure has been reported, and measured attenuation losses agree theoretical predictions.
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