Influence of deposition temperature on the crystallinity of Al-doped ZnO thin films at glass substrates prepared by RF magnetron sputtering method

作者: Zhiyun Zhang , Chonggao Bao , Wenjing Yao , Shengqiang Ma , Lili Zhang

DOI: 10.1016/J.SPMI.2011.04.002

关键词:

摘要: … structure was indeed identified by the HRTEM as well as the Selected Area Electron Diffraction (SAED). The defect density of AZO film was investigated by HRTEM. The film deposited at …

参考文章(30)
K. Matsubara, H. Tampo, H. Shibata, A. Yamada, P. Fons, K. Iwata, S. Niki, Band-gap modified Al-doped Zn1-xMgxO transparent conducting films deposited by pulsed laser deposition Applied Physics Letters. ,vol. 85, pp. 1374- 1376 ,(2004) , 10.1063/1.1784544
J. G. Lu, S. Fujita, T. Kawaharamura, H. Nishinaka, Y. Kamada, T. Ohshima, Carrier concentration induced band-gap shift in Al-doped Zn1−xMgxO thin films Applied Physics Letters. ,vol. 89, pp. 262107- ,(2006) , 10.1063/1.2424308
Aixia Lu, Jia Sun, Jie Jiang, Qing Wan, Low-voltage transparent electric-double-layer ZnO-based thin-film transistors for portable transparent electronics Applied Physics Letters. ,vol. 96, pp. 043114- ,(2010) , 10.1063/1.3294325
Fahrettin Yakuphanoglu, Saliha Ilican, Mujdat Caglar, Yasemin Caglar, Microstructure and electro-optical properties of sol–gel derived Cd-doped ZnO films Superlattices and Microstructures. ,vol. 47, pp. 732- 743 ,(2010) , 10.1016/J.SPMI.2010.02.006
Hsin-Ying Lee, Ying-Hung Chou, Ching-Ting Lee, Wen-Yung Yeh, Mu-Tao Chu, Mechanisms of lighting enhancement of Al nanoclusters-embedded Al-doped ZnO film in GaN-based light-emitting diodes Journal of Applied Physics. ,vol. 107, pp. 014503- ,(2010) , 10.1063/1.3276092
Ding-Yeng Chen, Chun-Yao Hsu, Growth of Ga-doped ZnO films with ZnO buffer layer by sputtering at room temperature Superlattices and Microstructures. ,vol. 44, pp. 742- 753 ,(2008) , 10.1016/J.SPMI.2008.08.001
Bo He, Zhong Quan Ma, Jing Xu, Lei Zhao, Nan Sheng Zhang, Feng Li, Cheng Shen, Ling Shen, Xia Jie Meng, Cheng Yue Zhou, Zheng Shan Yu, Yan Ting Yin, Realization and characterization of an ITO/AZO/SiO2 / p - Si SIS heterojunction Superlattices and Microstructures. ,vol. 46, pp. 664- 671 ,(2009) , 10.1016/J.SPMI.2009.04.013
D. C. Look, D. C. Reynolds, C. W. Litton, R. L. Jones, D. B. Eason, G. Cantwell, Characterization of homoepitaxial p-type ZnO grown by molecular beam epitaxy Applied Physics Letters. ,vol. 81, pp. 1830- 1832 ,(2002) , 10.1063/1.1504875
D. C. Look, K. D. Leedy, D. H. Tomich, B. Bayraktaroglu, Mobility analysis of highly conducting thin films: Application to ZnO Applied Physics Letters. ,vol. 96, pp. 062102- ,(2010) , 10.1063/1.3310043