作者: Zhiyun Zhang , Chonggao Bao , Wenjing Yao , Shengqiang Ma , Lili Zhang
DOI: 10.1016/J.SPMI.2011.04.002
关键词:
摘要: … structure was indeed identified by the HRTEM as well as the Selected Area Electron Diffraction (SAED). The defect density of AZO film was investigated by HRTEM. The film deposited at …