Superconducting YBa2Cu3O7-x thin films prepared by DC plasma chemical vapour deposition
作者： W N Kang , Y S Yoon , S S Yom
DOI: 10.1088/0953-2048/7/6/001
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摘要: YBa2Cu3O7-x superconducting thin films were grown on polycrystalline yttria-stabilized zirconia (p-YSZ) and single-crystalline SrTiO3 substrates by DC plasma-assisted metallorganic chemical vapour deposition. A plasma was generated in the reaction chamber applying a potential of 200 V at current 2 mA. The as-deposited an substrate temperature 730 degrees C show sharp resistive transition Tc,zero=88 K. We that deposition is useful to obtain with c axis normal p-YSZ substrates.
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