Effect of the Surface Morphology of Seed and Mask Layers on InP Grown on Si by Epitaxial Lateral Overgrowth
作者： Carl Junesand , Chen Hu , Zhechao Wang , Wondwosen Metaferia , Pritesh Dagur
DOI: 10.1007/S11664-012-2164-9
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摘要: Heteroepitaxy of InP on Si by epitaxial lateral overgrowth (ELOG) using a thin seed layer as starting material is investigated, with special attention given to the effect surface morp ...
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