Growth study of nonpolar Zn1−xMgxO epitaxial films on a-plane bulk ZnO by plasma-assisted molecular beam epitaxy
作者： Bernhard Laumer , Fabian Schuster , Martin Stutzmann , Andreas Bergmaier , Günther Dollinger
DOI: 10.1063/1.4754076
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摘要: Nonpolar Zn1−xMgxO epitaxial films were grown by plasma-assisted molecular beam epitaxy on a-plane ZnO substrates. A smooth surface morphology was accomplished under oxygen-rich growth conditions. The benefits of the use substrates structural properties are reflected a low-density threading dislocations. Furthermore, no indications for generation basal plane stacking faults found. pseudomorphic efficiently locks to wurtzite structure up x = 0.25. Mg concentration is not constant and increases with larger thickness. optical reflect influence alloy disorder.
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