New high‐efficiency quasi‐continuous operation of an ArF(B→X) excimer lamp excited by microwave discharge
作者： Hiroshi Kumagai , Minoru Obara
DOI: 10.1063/1.102247
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摘要: A quasi‐continuous ArF(193 nm:B→X) fluorescence of over 8 ms pulse duration with 100 Hz operation frequency was observed in a microwave‐discharge‐pumped ArF lamp. The average power 29 W obtained an intrinsic efficiency 4.4% 655 microwave deposition. peak 53 5.5% also obtained.
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