Electron beam induced degradation of a pulsed laser deposited ZnS:Cu,Au,Al thin film on a Si(1 0 0) substrate

作者: K.T. Hillie , H.C. Swart

DOI: 10.1016/S0169-4332(01)00572-4

关键词:

摘要: Abstract ZnS:Cu,Au,Al thin film phosphors grown on Si(1 0 0) were subjected to an electron beam irradiation with energies ranging from 1 5 keV and current densities between 16 89 mA at O 2 CO partial pressure of 5×10 −7 Torr . Auger spectroscopy (AES) the cathodoluminescence (CL), both excited by same primary utilised monitor changes in surface composition luminous efficiency films during bombardment, respectively. The degradation mechanism for these reactive gases ambient was manifested depletion S formation a non-luminescent ZnO layer phosphor. more severe under compared which is attributed free energy ZnS when respective are used. rate also depends beam, decreasing increasing energy. This interpreted according ionisation cross-section profile. CL brightness increased exponentially as carriers that will subsequently recombine yielding CL, higher energies.

参考文章(20)
Graham K. Hubler, Douglas B. Chrisey, Pulsed laser deposition of thin films Pulsed Laser Deposition of Thin Films. pp. 1675- 1689 ,(2003) , 10.1201/NOE0750309608-90
Takashi Hase, Tsuyoshi Kano, Eiichiro Nakazawa, Hajime Yamamoto, Phosphor materials for cathode-ray tubes Advances in electronics and electron physics. ,vol. 79, pp. 271- 373 ,(1990) , 10.1016/S0065-2539(08)60600-9
C. H. Seager, D. R. Tallant, L. Shea, K. R. Zavadil, B. Gnade, P. H. Holloway, J. S. Bang, X. M. Zhang, A. Vecht, C. S. Gibbons, P. Trwoga, C. Summers, B. Wagner, J. Penczek, INFLUENCE OF VACUUM ENVIRONMENT ON THE AGING OF PHOSPHORS AT LOW ELECTRON ENERGIES Journal of Vacuum Science and Technology. ,vol. 17, pp. 3509- 3515 ,(1999) , 10.1116/1.582032
Pehr E. Pehrsson, Brian D. Thoms, Surface oxidation chemistry of β-SiC Journal of Vacuum Science and Technology. ,vol. 15, pp. 1- 9 ,(1997) , 10.1116/1.580466
H. C. Swart, J. S. Sebastian, T. A. Trottier, S. L. Jones, P. H. Holloway, Degradation of zinc sulfide phosphors under electron bombardment Journal of Vacuum Science and Technology. ,vol. 14, pp. 1697- 1703 ,(1996) , 10.1116/1.580322
L Oosthuizen, H.C Swart, P.E Viljoen, P.H Holloway, G.L.P Berning, ZnS:Cu,Al,Au phosphor degradation under electron excitation Applied Surface Science. ,vol. 120, pp. 9- 14 ,(1997) , 10.1016/S0169-4332(97)00246-8
R. Baptist, Microtips and resistive sheet: A theoretical description of the emissive properties of this system Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 15, pp. 385- 390 ,(1997) , 10.1116/1.589322
C.W. Wang, T.J. Sheu, Y.K. Su, M. Yokoyama, The study of aging mechanism in ZnS:Mn thin-film electroluminescent devices grown by MOCVD Applied Surface Science. ,vol. 113114, pp. 709- 713 ,(1997) , 10.1016/S0169-4332(96)00931-2
Y. Darici, P. H. Holloway, J. Sebastian, T. Trottier, S. Jones, J. Rodriquez, Electron beam dissociation of CO and CO2 on ZnS thin films Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 17, pp. 692- 697 ,(1999) , 10.1116/1.581688
M. McLaughlin, H. F. Sakeek, P. Maguire, W. G. Graham, J. Molloy, T. Morrow, S. Laverty, J. Anderson, Properties of ZnS thin films prepared by 248-nm pulsed laser deposition Applied Physics Letters. ,vol. 63, pp. 1865- 1867 ,(1993) , 10.1063/1.110656