Structural study of growth, orientation and defects characteristics in the functional microelectromechanical system material aluminium nitride
作者： Viktor Hrkac , Aaron Kobler , Stephan Marauska , Adrian Petraru , Ulrich Schürmann
DOI: 10.1063/1.4905109
关键词:
摘要: The real structure and morphology of piezoelectric aluminum nitride (AlN) thin films as essential components of magnetoelectric sensors are investigated via advanced transmission …
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