Oxidation of Ge(100) and Ge(111) surfaces: an UPS and XPS study

作者: K. Prabhakaran , T. Ogino

DOI: 10.1016/0039-6028(94)00746-2

关键词:

摘要: In situ and ex situ oxidation studies are carried out on Ge (100) and Ge (111) employing techniques of ultraviolet and X-ray photoelectron spectroscopy (UPS and XPS). In situ oxidation produces mainly GeO on both the surfaces. Ge 3d and 2p levels show a chemical shift of about 1.4 and 1.8 eV respectively corresponding to this oxide. GeO desorbs from the surface on annealing to 400° C without undergoing any transformation. On exposing to air, a mixture of oxides consisting mainly of GeO and GeO2 are formed on both the surfaces. Ge …

参考文章(21)
Akitoshi Ishizaka, Yasuhiro Shiraki, Low Temperature Surface Cleaning of Silicon and Its Application to Silicon MBE Journal of The Electrochemical Society. ,vol. 133, pp. 666- 671 ,(1986) , 10.1149/1.2108651
R. Shinar, A. G. Entringer, J. Shinar, H.‐S. Wu, H. R. Shanks, The interaction of oxygen molecules with amorphous Ge, Ge:H, and some Ge:C:H alloys Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 7, pp. 2998- 3004 ,(1989) , 10.1116/1.576306
Werner Kutzelnigg, Die chemische Bindung bei den höheren Hauptgruppenelementen Angewandte Chemie. ,vol. 96, pp. 262- 286 ,(1984) , 10.1002/ANGE.19840960405
E.J.J. Kirchner, E.J. Baerends, A theoretical study of oxygen adsorption on Ge(001) Surface Science. ,vol. 311, pp. 126- 138 ,(1994) , 10.1016/0039-6028(94)90484-7
A.G. Entringer, R. Shinar, H.R. Shanks, The interaction of O2, NO, and N2O with Ge surfaces Surface Science. ,vol. 234, pp. 221- 230 ,(1990) , 10.1016/0039-6028(90)90555-M
S.S. Iyer, G.L. Patton, J.M.C. Stork, B.S. Meyerson, D.L. Harame, Heterojunction bipolar transistors using Si-Ge alloys IEEE Transactions on Electron Devices. ,vol. 36, pp. 2043- 2064 ,(1989) , 10.1109/16.40887
D. Schmeisser, R.D. Schnell, A. Bogen, F.J. Himpsel, D. Rieger, G. Landgren, J.F. Morar, Surface oxidation states of germanium Surface Science. ,vol. 172, pp. 455- 465 ,(1986) , 10.1016/0039-6028(86)90767-3
J. E. Rowe, Photoemission and electron energy loss spectroscopy of GeO2and SiO2 Applied Physics Letters. ,vol. 25, pp. 576- 578 ,(1974) , 10.1063/1.1655317
H.J. Kuhr, W. Ranke, Orientation dependent adsorption of oxygen on a cylindrical Ge sample Surface Science. ,vol. 201, pp. 408- 418 ,(1988) , 10.1016/0039-6028(88)90494-3
Inder P. Batra, P. S. Bagus, K. Hermann, Chemisorption of Atomic Oxygen on Si(100): Self-Consistent Cluster and Slab Model Investigations Physical Review Letters. ,vol. 52, pp. 384- 387 ,(1984) , 10.1103/PHYSREVLETT.52.384