作者: Ghavam Shahidi , Tze-Chiang Chen , Fariborz Assaderaghi , Edward Nowak , K. Muller
DOI:
关键词:
摘要: Short channel effects are effectively suppressed by steep impurity concentration gradients which can be placed with improved accuracy of location and geometry while relaxing process tolerances implanting impurities in a polysilicon seed adjacent conduction transistor diffusing therefrom into the channel. The also allows epitaxial growth source/drain contacts having configuration minimizes current density path length therein providing further mechanical advantages.