Soi transistor with polysilicon seed

作者: Ghavam Shahidi , Tze-Chiang Chen , Fariborz Assaderaghi , Edward Nowak , K. Muller

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摘要: Short channel effects are effectively suppressed by steep impurity concentration gradients which can be placed with improved accuracy of location and geometry while relaxing process tolerances implanting impurities in a polysilicon seed adjacent conduction transistor diffusing therefrom into the channel. The also allows epitaxial growth source/drain contacts having configuration minimizes current density path length therein providing further mechanical advantages.

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