Process for manufacturing a semiconductor chip

作者: Keiichi Kajiyama , Kentaro Odanaka

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摘要: A process for manufacturing a semiconductor chip by dividing wafer having plurality of streets formed in lattice-like form on the front surface into individual chips, and affixing an adhesive film die bonding to back surfaces comprising groove forming step grooves predetermined depth from along streets; protective member thereon wafer; exposing grinding divide chips; individually divided cutting applying laser beam affixed chips side cut grooves.

参考文章(4)
Hiroshi Sawada, Substrate cutting method ,(2002)
Shinya Takyu, Shigeo Sasaki, Koichi Yazima, Keisuke Tokubuchi, Hideo Nakayoshi, Method of dividing a wafer and method of manufacturing a semiconductor device ,(1998)
Shinya Takyu, Keisuke Tokubuchi, Hideo Nakayoshi, Tetsuya Kurosawa, Method of dividing a wafer ,(2000)