作者: Keiichi Kajiyama , Kentaro Odanaka
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摘要: A process for manufacturing a semiconductor chip by dividing wafer having plurality of streets formed in lattice-like form on the front surface into individual chips, and affixing an adhesive film die bonding to back surfaces comprising groove forming step grooves predetermined depth from along streets; protective member thereon wafer; exposing grinding divide chips; individually divided cutting applying laser beam affixed chips side cut grooves.