Effect of annealing on the structural, optical and electrical properties of ITO films by RF sputtering under low vacuum level
作者： T.S. Sathiaraj
DOI: 10.1016/J.MEJO.2008.06.081
关键词:
摘要: … Indium tin oxide (ITO) thin films were prepared by RF sputtering of ceramic ITO target in … Measured and calculated R and T spectra of ITO film deposited at 200 W RF power and …
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