The Effect of Zn/Sn Different Raito of InZnSnO Thin Films Prepared by RF Magnetron Sputtering
作者： Ki Hwan Kim , Maryane Putri , Chang Young Koo , Jung-A Lee , Jeong-Joo Kim
DOI: 10.4313/JKEM.2013.26.8.591
关键词: Analytical chemistry 、 Sputter deposition 、 Substrate (electronics) 、 Indium tin oxide 、 Ion 、 Materials science 、 Thin film 、 Oxide 、 Electrical resistivity and conductivity 、 Indium
摘要: Indium Zinc Tin Oxide (IZTO) thin films were developed as an alternative to (ITO) films. ITO material which has been acknowledged with its low resistivity and optical transparency of 85-90% used major transparent conducting oxide (TCO) materials. However, due the limited source, high price, instability problems at temperature indium, many researches focused on indium-saving TCO Mason Group Northwestern University was reported expand solubility limit up 40% by co-doping 1:1 ratio Zn +2 Sn +4 ions. In this study, properties IZTO corresponding Zn/Sn different investigated. addition, effect substrate variable structural, electrical
koreascience.or.kr 参考文章(16)
Tadatsugu Minami, Substitution of transparent conducting oxide thin films for indium tin oxide transparent electrode applications Thin Solid Films. ,vol. 516, pp. 1314- 1321 ,(2008) , 10.1016/J.TSF.2007.03.082
Gi-Seok Heo, In-Gi Gim, Jong-Woon Park, Kwang-Young Kim, Tae-Won Kim, Effects of substrate temperature on properties of ITO–ZnO composition spread films fabricated by combinatorial RF magnetron sputtering Journal of Solid State Chemistry. ,vol. 182, pp. 2937- 2940 ,(2009) , 10.1016/J.JSSC.2009.07.025
Ju-Il Song, Jae-Soung Park, Howoon Kim, Young-Woo Heo, Joon-Hyung Lee, Jeong-Joo Kim, G. M. Kim, Byeong Dae Choi, Transparent amorphous indium zinc oxide thin-film transistors fabricated at room temperature Applied Physics Letters. ,vol. 90, pp. 022106- ,(2007) , 10.1063/1.2430917
Hong Chan Ma, Damisih, Maryane Putri, Jong Hoon Cheon, Jae Hong Kim, Hee Young Lee, The effect of post-annealing treatment on the characteristics of a dye-sensitized solar cell with an indium zinc tin oxide electrode Journal of the Korean Physical Society. ,vol. 61, pp. 1994- 1999 ,(2012) , 10.3938/JKPS.61.1994
T.S. Sathiaraj, Effect of annealing on the structural, optical and electrical properties of ITO films by RF sputtering under low vacuum level Microelectronics Journal. ,vol. 39, pp. 1444- 1451 ,(2008) , 10.1016/J.MEJO.2008.06.081
Damisih, Hong Chan Ma, Jeong-Joo Kim, Hee Young Lee, The electrical and optical properties of indium zinc tin oxide thin films with different Sn/Zn ratio Thin Solid Films. ,vol. 520, pp. 3741- 3745 ,(2012) , 10.1016/J.TSF.2011.10.064
Hyung Jun Cho, Sung Uk Lee, Byungyou Hong, Yong Deok Shin, Jin Young Ju, Hee Dong Kim, Mungi Park, Won Seok Choi, The effect of annealing on Al-doped ZnO films deposited by RF magnetron sputtering method for transparent electrodes Thin Solid Films. ,vol. 518, pp. 2941- 2944 ,(2010) , 10.1016/J.TSF.2009.10.130
V.S. Vidhya, V. Malathy, T. Balasubramanian, V. Saaminathan, C. Sanjeeviraja, M. Jayachandran, Influence of RF power on the growth mechanism, preferential orientation and optoelectronic properties of nanocrystalline ITO films Current Applied Physics. ,vol. 11, pp. 286- 294 ,(2011) , 10.1016/J.CAP.2010.07.021
K.J. Saji, M.K. Jayaraj, Optical and electrical properties of co-sputtered amorphous transparent conducting zinc indium tin oxide thin films Thin Solid Films. ,vol. 516, pp. 6002- 6007 ,(2008) , 10.1016/J.TSF.2007.10.097
K.L. Chopra, S. Major, D.K. Pandya, Transparent conductors—A status review Thin Solid Films. ,vol. 102, pp. 1- 46 ,(1983) , 10.1016/0040-6090(83)90256-0