Calibration as well as measurement on the same workpiece during fabrication
作者： Jiping Li , Jon Madsen , Peter G. Borden
DOI:
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摘要: Two more measurements are made on the same workpiece, during fabrication. Each measurement may be employing a different process. The used together to determine property of workpiece. For example, multiple from first process with predetermined value interest in simulator generate simulated signal measured second One or such values and identify interest. When workpiece's is found not match specification, control parameter fabrication adjusted, thereby implement control.
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