Relaxation of layers
作者： Zohra Chahra , Romain Larderet , Nicolas Daval
DOI:
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摘要: The invention relates to a method of forming layer elastically unstrained crystalline material intended for electronics, optics, or optronics applications, wherein the is carried out using structure that includes first which strained under tension (or respectively in compression) and second compression tension), with being adjacent layer. step diffusion between two layers so differences respective compositions progressively reduced until they are substantially same, then form just single final having composition which, aggregate, uniform, compositions, thicknesses, degrees strain initially selected that, after diffusion, constituting no longer, exhibits elastic strain. can be accomplished by heat treating structure.
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