Extreme ultraviolet light generator
作者： Osamu Wakabayashi , Tatsuya Yanagida
DOI:
关键词:
摘要: Disclosed is a chamber apparatus which can be used along with at least one laser beam generator. The may comprise: serves the purpose of introducing emitted from generator into inside and has entrance; target supply unit arranged in substance to predetermined zone chamber; laser-focusing optical system focus zone; an element correct light intensity distribution cross-section zone.
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