Silent-discharge driven excimer UV sources and their applications

作者: Ulrich Kogelschatz

DOI: 10.1016/0169-4332(92)90080-H

关键词:

摘要: … Each current filament or microdischarge is of short duration (< … surface the microdischarges spread into surface discharges … is removed with small but finite removal rates and that the …

参考文章(69)
Kazuhiko Suzuki, Yohsuke Yukawa, Hiroaki Takao, Koichi Kuroiwa, Yasuo Tarui, Characterization of Photo-CVD a-Si:H Films by Thin-Film Transistor Structure Japanese Journal of Applied Physics. ,vol. 25, pp. L811- L813 ,(1986) , 10.1143/JJAP.25.L811
A. Gupta, R. Jagannathan, Laser writing of copper lines from metalorganic films Applied Physics Letters. ,vol. 51, pp. 2254- 2256 ,(1987) , 10.1063/1.98928
Hiroshi Kumagai, Minoru Obara, New high‐efficiency quasi‐continuous operation of an ArF(B→X) excimer lamp excited by microwave discharge Applied Physics Letters. ,vol. 55, pp. 1583- 1584 ,(1989) , 10.1063/1.102247
Akihiko Yoshikawa, Shigeki Yamaga, Growth of Hydrogenated Amorphous Silicon Films by ArF Excimer Laser Photodissociation of Disilane Japanese Journal of Applied Physics. ,vol. 23, pp. L91- L93 ,(1984) , 10.1143/JJAP.23.L91
P.A. Robertson, W.I. Milne, Novel technique for deposition of hydrogenated amorphous silicon thin films Electronics Letters. ,vol. 22, pp. 603- 605 ,(1986) , 10.1049/EL:19860410
Kohji Inoue, Yoshiki Nakatani, Masanori Okuyama, Yoshihiro Hamakawa, Growth of SiO2 thin film by double‐excitation photoinduced chemical vapor deposition incorporated with microwave excitation of oxygen Journal of Applied Physics. ,vol. 64, pp. 6496- 6501 ,(1988) , 10.1063/1.342067
E. Sutcliffe, R. Srinivasan, Dynamics of UV laser ablation of organic polymer surfaces Journal of Applied Physics. ,vol. 60, pp. 3315- 3322 ,(1986) , 10.1063/1.337698
Hugo Steemers, Michael Hack, Richard Weisfield, Hsing Tuan, Malcolm Thompson, None, The physics of amorphous silicon thin-film devices and their application to document processing Philosophical Magazine Part B. ,vol. 63, pp. 337- 348 ,(1991) , 10.1080/01418639108224450
F. Kessler, H.-D. Mohring, G.H. Bauer, Direct a-Si:H Photo-CVD Deposition with the Excimer Spectra of a Dielectric-Barrier Discharge Lamp MRS Proceedings. ,vol. 192, pp. 559- ,(1990) , 10.1557/PROC-192-559