Oxygen migration during epitaxial regrowth in Cs + -irradiated α-quartz investigated by means of nuclear reaction analysis
作者： F. Roccaforte , F. Harbsmeier , S. Dhar , K. P. Lieb
DOI: 10.1063/1.126757
关键词:
摘要: The migration of oxygen in ion-beam-amorphized c-SiO2 (α-quartz) was investigated by means nuclear reaction analysis using the resonant 18O(p,α)15N for depth profiling. Only very small amounts were observed to diffuse crystalline or Xe+-ion beam-amorphized α-quartz after high-temperature annealing. However, a dramatic occurs Cs+-implanted same temperature range (600–900 °C), where Cs diffuses out amorphized layer and epitaxial recrystallization occurs. These results point strong correlation all these processes. A mechanism explain indiffusion 18O is proposed related topological modification achieve regrowth SiO2 matrix.
harvard.edu
scitation.org
aip.org
sci-hub.se 参考文章(13)
Paolo Mazzoldi, George Arnold, Ion beam modification of insulators Elsevier. ,(1987)
F. Roccaforte, S. Dhar, F. Harbsmeier, K. P. Lieb, Epitaxial crystallization of amorphous SiO2 films deposited on single-crystalline α-quartz Applied Physics Letters. ,vol. 75, pp. 2903- 2905 ,(1999) , 10.1063/1.125185
Sankar Dhar, Wolfgang Bolse, Klaus-Peter Lieb, Ion-beam induced amorphization and dynamic epitaxial recrystallization in α-quartz Journal of Applied Physics. ,vol. 85, pp. 3120- 3123 ,(1999) , 10.1063/1.369650
Carol S. Marians, Linn W. Hobbs, Network properties of crystalline polymorphs of silica Journal of Non-crystalline Solids. ,vol. 124, pp. 242- 253 ,(1990) , 10.1016/0022-3093(90)90269-R
M. Gustafsson, F. Roccaforte, J. Keinonen, W. Bolse, L. Ziegeler, K. P. Lieb, Oxygen-activated epitaxial recrystallization of Li-implanted α-SiO 2 Physical Review B. ,vol. 61, pp. 3327- 3332 ,(2000) , 10.1103/PHYSREVB.61.3327
F. Harbsmeier, W. Bolse, Ion beam induced amorphization in α quartz Journal of Applied Physics. ,vol. 83, pp. 4049- 4054 ,(1998) , 10.1063/1.367224
F Roccaforte, W Bolse, K.P Lieb, Network modification and epitaxial recrystallisation of ion-implanted α-quartz Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 148, pp. 692- 697 ,(1999) , 10.1016/S0168-583X(98)00661-2
F. Roccaforte, W. Bolse, K. P. Lieb, Solid phase epitaxial regrowth of ion beam-amorphized α-quartz Applied Physics Letters. ,vol. 73, pp. 1349- 1351 ,(1998) , 10.1063/1.122159
M. Uhrmacher, K. Pampus, F.J. Bergmeister, D. Purschke, K.P. Lieb, Energy calibration of the 500 kV heavy ion implanter ionas Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ,vol. 9, pp. 234- 242 ,(1985) , 10.1016/0168-583X(85)90688-3
G. Devaud, C. Hayzelden, M.J. Aziz, D. Turnbull, Growth of quartz from amorphous silica at ambient pressure Journal of Non-crystalline Solids. ,vol. 134, pp. 129- 132 ,(1991) , 10.1016/0022-3093(91)90020-7