Controls over Structural and Electronic Properties of Epitaxial Graphene on Silicon Using Surface Termination of 3C-SiC(111)/Si

作者: Hirokazu Fukidome , Shunsuke Abe , Ryota Takahashi , Kei Imaizumi , Syuya Inomata

DOI: 10.1143/APEX.4.115104

关键词:

摘要: Epitaxial graphene on Si (GOS) using a heteroepitaxy of 3C-SiC/Si has attracted recent attention owing to its capability fuse with Si-based electronics. We demonstrate that the stacking, interface structure, and hence, electronic properties GOS can be controlled by tuning surface termination 3C-SiC(111)/Si, proper choice substrate SiC growth conditions. On Si-terminated 3C-SiC(111)/Si(111) surface, is Bernal-stacked band splitting, while C-terminated 3C-SiC(111)/Si(110) turbostratically stacked without splitting. This work enables us precisely control for forthcoming devices.

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