Controlling The Flow Of Vapors Sublimated From Solids

摘要: A vapor delivery system comprises a combination of heated vaporizer for the solid material operable at sub atmospheric pressure and passage from to vacuum chamber, including throttle valve followed by conduit, gauge that is responsive being located between surfaces are exposed sublimed vapor, such valve, adapted be held temperature above condensation material, closed-loop control incorporating constructed vary conductance downstream in response output gauge, flow chamber thereby determined region throttling conduit.