Characterization of thermochromic VO 2 (prepared at 250 °C) in a wide temperature range by spectroscopic ellipsometry

摘要: Abstract The paper deals with thermochromic VO 2 prepared by reactive high-power impulse magnetron sputtering and characterized spectroscopic ellipsometry. We focus on the dispersion of optical constants in a wide temperature range transmittance predicted using constants. While behavior itself has been reported previously (particularly above room temperature, RT), this we present (i) properties achieved at low deposition 250 °C without any substrate bias voltage (which dramatically increases application potential coating) (ii) changes these not only but also below RT (down to −30 °C). include very (for ) extinction coefficient (0.10 550 nm), transition around or even 50 °C (compared frequently cited 68 °C) high modulation infrared (e.g. 39% −30 °C, 30% 3.4% 2000 nm for 100 nm thick coating glass). results are important design coatings, pathways their preparation under industry-friendly conditions, various technological applications.